RINCON furnaces are
designed for reliable, continuous operation at 2050 °C in production or process
development environments. The Rincon furnaces process work loads from 50 lbs to 1000 lbs
in hydrogen, nitrogen or inert gas. In addition, optional high vacuum systems provide
ultimate pressures in the 10-8 torr vacuum range.
The proprietary tungsten and molybdenum (or
tantalum) hot zones have low thermal mass allowing rapid heating and cooling and provide
exceptional temperature uniformity. The construction is rugged, clean, non-particulate,
and minimizes absorption of water or volatile species evolved from the work load.
The RINCON series utilizes the time tested
"bell" configuration in which the work is placed on a hearth and the heating
element, radiation shields and chamber are lowered over the work. A microprocessor-based
temperature programmer and programmable logic controller (PLC) provide completely
automatic, unattended control with precise, repeatable results. Programs
can be quickly and accurately changed from one run to the next using optional memory
cartridges. These capabilities allow a variety of products to be processed with
confidence.
A key feature of the Rincon Series is its
ability to attain very low dewpoints. Stainless steel welded manifolds, dewpoint sensors,
mass flow controlled gas streams, and -120 °C dewpoint gas dryers are available to ensure
precise, predictable atmosphere control. The RINCON series furnaces are designed with the
user in mind emphasizing ease of installation, maintenance, programming and operation.
Typical Process Applications:
- Sintering and annealing nonoxide and oxide ceramics, e.g.
aluminum nitride, lucalox, sapphire and others
- Co-lining aluminum nitride multilayer interconnect packages
tungsten and molybdenum sintering in hydrogen
- Tantalum capacitor sintering with a tantalum hot zone in
high vacuum
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Specifications:
- Temperature rating: 2050 °C continuous.
- Hot zone materials: All tungsten element, tungsten and
molybdenum shields.
- Programmable loop and logic controller with operator
interface; Honeywell UMC900 or Siemens S7-300.
- Independent overtemperature protection:
Honeywell, Inc. UDC 2500.
- SCR Power Controller: Phase angle fired, instantaneous
overcurrent trip, phase loss protection, subcycle fuses, water-cooled heat sink.
- Transformer: Water-cooled, low temperature rise.
- Hydraulic system for raising, lowering and clamping the
chamber.Process gas system: Fully interlocked, pressure regulated and flow regulated.
- Hydrogen burnoff: Dual igniter coil with current sensing
relay.
- Power: 480 VAC ±5%, 3 phase, 60 Hz (optional 380/415 VAC,
50 Hz)
- Hydrogen: 30-50 psig (2-4 bar) input.
Process pressure: 0.5-2 psig (30-130 mbar).
- Nitrogen (or Argon): 30-60 psig (2-4 bar) input. Process
pressure: 0.5-2 psig (30-130 mbar).
- Compressed air: 100-120 psig (7-8 bar).
- Water flow: 30-90 gpm (115-340 ltr/min) @ 30 psi.
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